- Production proven, with over 3000 systems installed in 35 countries
- X,Y GRR < 4% on 01005 @ +/- 50 um PTW
- Low false call down to 50 ppm in production
- Inspection speed up to 100 cm2/s
- Laser option for 3D measurements
- 12 bit – 8 M Pixel CCD Camera
- Telecentric Lens
- RGB lighting with holographic diffuser
- 4,75 μm sub pixel technology