- Drilling Accuracy：±10µm (target drilling)/±20µm (mark centering drilling)

- Throughput: around 8.5sec/panel (3-target in drilling)

- Drilling Operation Setup:1,2,3,4,7 mark center drilling/2-target in mark drill、2-target in mark center drill 、2-target in mark 1 post-drill/Counterpoised Compensation Drilling/Manual Drilling

- Error of Repeated Measurement:≦10µm

- Scaling control

- Slipperlayers control

- Pre-alignment function